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论文库 |
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| 论文编号: |
2015-2014 |
| 作者: |
Wang, Qian(1,2); Li, Bincheng(1); Ren, Shengdong(1,2); Wang, Qiang(1) |
| 刊物名称: |
International Journal of Thermophysics |
| 所属学科: |
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| 论文题目英文: |
Photocarrier Radiometry Characterization of Ultra-shallow Junctions (USJ) in Silicon with Excimer Laser Irradiation |
| 年: |
2015 |
| 卷: |
36 |
| 期: |
5-6 |
| 页: |
1173-1180 |
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