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论文编号: |
2015-2013 |
作者: |
Ren, Shengdong(1,2,3); Li, Bincheng(1,2); Wang, Qian(1,2,3) |
刊物名称: |
International Journal of Thermophysics |
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论文题目英文: |
Combined Frequency- and Time-Domain Photocarrier Radiometry Characterization for Annealing Temperature Dependence of Arsenic Ion-Implanted Silicon Wafers |
年: |
2015 |
卷: |
36 |
期: |
5-6 |
页: |
1045-1050 |
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