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论文编号: |
2014-2167 |
作者: |
Zhang, Man; Deng, Qiling; Shi, Lifang; Pang, Hui; Cao, Axiu; Hu, Song |
刊物名称: |
Proceedings of SPIE: NANOPHOTONICS AND MICRO/NANO OPTICS II |
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论文题目英文: |
Fabrication of nano-pillar with sub-100nm resolution based on thiol-ene |
年: |
2014 |
卷: |
9277 |
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