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论文编号: |
2014-2072 |
作者: |
Wang, Changtao(1); Gao, Ping(1); Zhao, Zeyu(1); Yao, Na(1); Wang, Qinyan(1); Luo, Xiangang(1) |
刊物名称: |
Optics InfoBase Conference Papers: CLEO: Science and Innovations, CLEO_SI 2014 |
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论文题目英文: |
Reflective plasmonic imaging lithography with deep sub-wavelength resolution and high aspect ratio |
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2014 |
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