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论文库 |
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| 论文编号: |
2014-2031 |
| 作者: |
Di, Chengliang; Hu, Song; Yan, Wei; Li, Yanli; Li, Guang; Tong, Junmin |
| 刊物名称: |
IEEE PHOTONICS JOURNAL |
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| 论文题目英文: |
Interferometric Scheme for High-Sensitivity Coaxial Focusing in Projection Lithography |
| 年: |
2014 |
| 卷: |
6 |
| 期: |
3 |
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