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| 论文编号: |
2013-2100 |
| 作者: |
Kai, Meng(1,2); Yongjian, Wan(1); Qinglan, Xu(1); Zhang, Yang(3) |
| 刊物名称: |
Proceedings of SPIE: International Symposium on Photoelectronic Detection and Imaging 2013: Micro/Nano Optical Imaging Technologies and Applications |
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| 论文题目英文: |
Orthogonal experiment and analysis on process parameters of bowl feed polishing (BFP) |
| 年: |
2013 |
| 卷: |
8911 |
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| 页: |
89110Q |
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