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论文库 |
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| 论文编号: |
2013-2071 |
| 作者: |
Xu, Feng(1,2); Hu, Song(1); Yang, Yong(1); Li, Jinlong(1,2); Li, Lanlan(1,2) |
| 刊物名称: |
Optik |
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| 论文题目英文: |
Single closed fringe pattern phase demodulation in alignment of nanolithography |
| 年: |
2013 |
| 卷: |
124 |
| 期: |
9 |
| 页: |
818-823 |
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