 |
论文库 |
|
|
|
|
| 论文编号: |
2013-2055 |
| 作者: |
Jia, Xin(1); Xu, Fuchao(1); Xing, Tingwen(1); Liu, Zhixiang(1) |
| 刊物名称: |
Proceedings of SPIE: Modeling Aspects in Optical Metrology IV, 2013 |
| 所属学科: |
|
| 论文题目英文: |
Absolute testing of flats with all terms by using even and odd functions |
| 年: |
2013 |
| 卷: |
8789 |
| 期: |
|
| 页: |
878911 |
| 联系作者: |
|
| 收录类别: |
|
| 影响因子: |
|
| 参与作者: |
|
| 备注: |
|
|
|
|
|
