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论文库 |
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| 论文编号: |
2013-2014 |
| 作者: |
Jia, Xin(1); Xing, Tingwen(1); Xu, Jiajun(1); Lin, Wumei(1); Liao, Zhijie(1) |
| 刊物名称: |
Proceedings of SPIE: Optical Microlithography XXVI |
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| 论文题目英文: |
Wavefront testing of pinhole based on point diffraction interferometer |
| 年: |
2013 |
| 卷: |
8683 |
| 期: |
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| 页: |
86832F |
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