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| 论文编号: |
2013-2007 |
| 作者: |
Zhengpeng, Yao(1,2); Tingwen, Xing(1) |
| 刊物名称: |
Proceedings of SPIE: Optical Measurement Systems for Industrial Inspection VIII |
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| 论文题目英文: |
The impact of polarization on metrology performance of the lateral shearing interferometer |
| 年: |
2013 |
| 卷: |
8788 |
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| 页: |
87882F |
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