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论文编号: |
2013-2007 |
作者: |
Zhengpeng, Yao(1,2); Tingwen, Xing(1) |
刊物名称: |
Proceedings of SPIE: Optical Measurement Systems for Industrial Inspection VIII |
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论文题目英文: |
The impact of polarization on metrology performance of the lateral shearing interferometer |
年: |
2013 |
卷: |
8788 |
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页: |
87882F |
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