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作者: |
Shu Qiang,?Xuejun Rao,?Ningping Shi |
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Proc. SPIE,8418,84181I (October 15, 2012); doi: 10.1117/12.970645 |
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论文题目英文: |
Inverse open-loop control of a nano-positioner based on piezo-electric actuators |
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2012 |
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