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论文库 |
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| 论文编号: |
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| 作者: |
Hongwei Zhu,？Tingwen Xing,？Zexiang Chen |
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Proc. SPIE,8417,84172C (October 15, 2012); doi: 10.1117/12.975794 |
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| 论文题目英文: |
Simulation of surface deformation for the lithographic object lens by Zernike polynomials |
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2012 |
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