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论文库 |
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| 论文编号: |
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| 作者: |
Yao, Jun (State Key Laboratory of Optical Technologies for Microfabrication, Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu 610209, China); Tao, Feng-Gang; Ren, Hao; Wang, Wei-Min; Zhuang, Xu-Ye |
| 刊物名称: |
Nami Jishu yu Jingmi Gongcheng/Nanotechnology and Precision Engineering, v 10, n 4, p 313-317, July 2012 |
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| 论文题目英文: |
Novel electrostatic bidirectional-translation MEMS deformable mirror |
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2012 |
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