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论文库 |
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| 论文编号: |
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| 作者: |
Jiangping Zhu,？Song Hu,？Jungshen Yu,？Yan Tang |
| 刊物名称: |
Opt. Eng. 51(11), 113603 (Nov 01, 2012).？doi:？10.1117/1.OE.51.11.113603 |
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| 论文题目英文: |
Alignment method based on matched dual-grating moire fringe for proximity lithography |
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2012 |
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