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| 论文编号: |
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| 作者: |
Lanlan Li,？Song Hu,？Lixin Zhao,？Ping Ma |
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Proc. SPIE,8418,84180M (October 15, 2012); doi: 10.1117/12.971476 |
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| 论文题目英文: |
Synchronous control strategy of wafer and reticle stage of step and scan lithography |
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2012 |
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