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作者: |
Liangxuan Shu,?Fan Wu,?Chunyan Shi |
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Proc. SPIE,8416,84162M (October 16, 2012); doi: 10.1117/12.974277 |
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论文题目英文: |
Optimization of the edge extension in dwell time algorithm for ion beam figuring |
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2012 |
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