 |
论文库 |
|
|
|
|
| 论文编号: |
|
| 作者: |
Ren, H (Ren, Hao); Tao, FG (Tao, Fenggang); Wang, WM (Wang, WEimin); Yao, J (Yao, Jun) |
| 刊物名称: |
JOURNAL OF MICROMECHANICS AND MICROENGINEERING Volume: 21 Issue: 4 Article Number: 045019 DOI: 10.1088/0960-1317/21/4/045019 Published: APR 2011 |
| 所属学科: |
|
| 论文题目英文: |
An out-of-plane electrostatic actuator based on the lever principle |
| 年: |
2011 |
| 卷: |
|
| 期: |
|
| 页: |
|
| 联系作者: |
|
| 收录类别: |
SCI,Ei |
| 影响因子: |
|
| 参与作者: |
|
| 备注: |
|
|
|
|
|
