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论文库 |
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| 论文编号: |
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| 作者: |
Yao, N (Yao, Na); Lai, Z (Lai, Zian); Fang, L (Fang, Liang); Wang, CT (Wang, Changtao); Feng, Q (Feng, Qin); Zhao, ZY (Zhao, Zheyu); Luo, XG (Luo, Xiangang) |
| 刊物名称: |
OPTICS EXPRESS Volume: 19 Issue: 17 Pages: 15982-15989 Published: AUG 15 2011 |
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| 论文题目英文: |
Improving resolution of superlens lithography by phase-shifting mask |
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2011 |
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| 收录类别: |
SCI,Ei |
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