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论文库 |
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| 论文编号: |
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| 作者: |
Xu, F (Xu, Feng); Song, H (Song, Hu); Zhou, SL (Zhou, Shaolin) |
| 刊物名称: |
OPTICAL ENGINEERING Volume: 50 Issue: 8 Article Number: 088001 DOI: 10.1117/1.3609007 Published: AUG 2011 |
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| 论文题目英文: |
Fringe pattern analysis for optical alignment in nanolithography using two-dimentional Fourier transform |
| 年: |
2011 |
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| 收录类别: |
SCI,Ei |
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