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论文库 |
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| 论文编号: |
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| 作者: |
Jiang, Wenbo (Institute of Optics and Electronics, Chinese Academy of Science, Chengdu 610209, China); Hu, Song; Zhao, Lixin; Yan, Wei; Yang, Yong; Zhou, Shaolin; Chen, Wangfu |
| 刊物名称: |
Journal of Computational and Theoretical Nanoscience |
| 所属学科: |
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| 论文题目英文: |
Fabrication of nanoscale line width using the improved optical maskless lithographic system |
| 年: |
2009 |
| 卷: |
6 |
| 期: |
5 |
| 页: |
1170-1174 |
| 联系作者: |
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| 收录类别: |
SCI Ei |
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